Inventor

OHSAWA TADAYASU

JP3 patents

Patents

3 patents

US5853284ADec 29, 1998

Notched wafer aligning apparatus

KAIJO KK19 citations74

US6325865B2Dec 4, 2001

Method for drying substrate

KAIJO KK2 citations55

US6244281B1Jun 12, 2001

Method and apparatus for drying substrate

KAIJO KK5 citations55