Inventor
BARTRAY PERTRUS RUTGERUS
NL5 patents
Patents
5 patentsUS6977713B2Dec 20, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations72
US7049592B2May 23, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations71
US7554105B2Jun 30, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations70
US7078708B2Jul 18, 2006
Lithographic apparatus and method of manufacturing a device and method of performing maintenance
ASML NETHERLANDS BV3 citations50
US7061579B2Jun 13, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations48