Inventor

OWCZARZ ALEKSANDER

US61 patents

⚠️ This page may combine multiple inventors who share the name “OWCZARZ ALEKSANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OWCZARZ ALEKSANDER

SEMITOOL INC

Multi-station semiconductor processor with volatilization

Semiconductor processor apparatus with dynamic wafer vapor treatment and particulate volatilization

Centrifugal wafer carrier cleaning apparatus

Single wafer processor with a frame

Semiconductor processor wafer holder

Semiconductor processor with extendible receiver for handling multiple discrete wafers without wafer carriers

Centrifugal wafer carrier cleaning apparatus

Centrifugal wafer carrier cleaning apparatus

Wafer holder with flexibly mounted gripping fingers

Semiconductor processor liquid spray system with additive blending

Robot loadable centrifugal semiconductor processor with extendible rotor

Single wafer processor apparatus

Single wafer processor with a bowl

Rinser dryer system

Single wafer processor apparatus

Semiconductor processor methods

Semiconductor processor draining

Semiconductor processor gas-liquid separation

Semiconductor processing apparatus

Pneumatic bellows pump with supported bellows tube

Gas phase semiconductor processor with liquid phase mixing

Low contamination blending and metering systems for semiconductor processing

Semiconductor processing apparatus

Seal configuration for use with a motor drive assembly in a microelectronic work piece processing system

Gas intake assembly for a wafer processing system

Motor drive assembly for a semiconductor wafer processing system

LAM RES CORP

Process tape for cleaning or processing the edge of a semiconductor wafer

Chemical mechanical planarization (CMP) apparatus

System and method for metal residue detection and mapping within a multi-step sequence

Method and apparatus of arrayed sensors for metrological control

Integration of sensor based metrology into semiconductor processing tools

Method and apparatus for real time metal film thickness measurement

Method and apparatus for cleaning a wafer bevel edge and notch using a pin and an abrasive film cassette

Enhancement of eddy current based measurement capabilities

Method and apparatus of arrayed sensors for metrological control

Apparatus for removal/remaining thickness profile manipulation

Method and apparatus for aligning and setting the axis of rotation of spindles of a multi-body system

Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control

Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control

Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties

Profiled retaining ring for chemical mechanical planarization

Apparatus for applying a plating solution for electroless deposition

Complementary sensors metrological process and method and apparatus for implementing the same

Method and apparatus for metrological process control implementing complementary sensors

Apparatuses and methods for cleaning a substrate

Apparatuses and methods for cleaning a substrate

Method and apparatus for aligning and setting the axis of rotation of spindles of a multi-body system

(unassigned)

Methods for centrifugally cleaning wafer carriers

BOYD JOHN

Controlled ambient system for interface engineering

THIE WILLIAM

Wafer electroless plating system and associated methods