Inventor
SCHULZE-ICKING GEORG
DE3 patents
Patents
3 patentsUS6413886B1Jul 2, 2002
Method for fabricating a microtechnical structure
INFINEON TECHNOLOGIES AG8 citations69
US7022209B2Apr 4, 2006
PVD method and PVD apparatus
INFINEON TECHNOLOGIES AG10 citations67
US6797613B2Sep 28, 2004
Process for depositing WSix layers on a high topography with a defined stoichiometry
INFINEON TECHNOLOGIES AG1 citations50