Inventor
JALBY PIERRE
FR3 patents
Patents
3 patentsUS5091209AFeb 25, 1992
Method of forming a thin copper film by low temperture CVD
AIR LIQUIDE36 citations90
US5230847AJul 27, 1993
Method of forming refractory metal free standing shapes
AIR LIQUIDE7 citations72
US5055246AOct 8, 1991
Method of forming high purity metal silicides targets for sputtering
AIR LIQUIDE8 citations72