P

Inventor

SAVAS STEPHEN EDWARD

US10 patents
⚠️ This page may combine multiple inventors who share the name “SAVAS STEPHEN EDWARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAVAS STEPHEN EDWARD

3 patents
US8697197B2Apr 15, 2014

Methods for plasma processing

SAVAS STEPHEN EDWARD23 citations89
US10049859B2Aug 14, 2018

Plasma generating units for processing a substrate

SAVAS STEPHEN EDWARD1 citations60
US8765232B2Jul 1, 2014

Apparatus and method for dielectric deposition

SAVAS STEPHEN EDWARD2 citations60

AIXTRON SE

3 patents
US10544519B2Jan 28, 2020

Method and apparatus for surface preparation prior to epitaxial deposition

AIXTRON SE8 citations81
US9721759B1Aug 1, 2017

System and method for distributing RF power to a plasma source

AIXTRON SE14 citations76
US10294562B2May 21, 2019

Exhaust manifold in a CVD reactor

AIXTRON SE0 citations33

(unassigned)

2 patents
US6838387B1Jan 4, 2005

Fast etching system and process

23 citations91
US6501636B1Dec 31, 2002

Electrostatic clamp for holding workpieces with irregular surfaces

7 citations72

ADVANCED ION BEAM TECH INC

1 patent
US9852887B2Dec 26, 2017

Ion source of an ion implanter

ADVANCED ION BEAM TECH INC6 citations71

AIXTRON INC

1 patent
US9359674B2Jun 7, 2016

Apparatus and method for dielectric deposition

AIXTRON INC0 citations50