Inventor

OMAMEUDA YOSHIHIRO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “OMAMEUDA YOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

2 patents

US9541845B2Jan 10, 2017

Exposure method, exposure apparatus, and method of manufacturing device

CANON KK3 citations64

US10558128B2Feb 11, 2020

Control device, lithography apparatus, and method of manufacturing article

CANON KK0 citations38

TAKANO SHIN

1 patent

US8319942B2Nov 27, 2012

Exposure apparatus and device fabrication method

TAKANO SHIN2 citations52