Inventor
SHIMIZU NOBURU
JP22 patents
⚠️ This page may combine multiple inventors who share the name “SHIMIZU NOBURU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
17 patentsUS6595831B1Jul 22, 2003
Method for polishing workpieces using fixed abrasives
EBARA CORP43 citations92
US6413156B1Jul 2, 2002
Method and apparatus for polishing workpiece
EBARA CORP31 citations92
US6343978B1Feb 5, 2002
Method and apparatus for polishing workpiece
EBARA CORP20 citations92
US5989107ANov 23, 1999
Method for polishing workpieces and apparatus therefor
EBARA CORP27 citations92
US5951368ASep 14, 1999
Polishing apparatus
EBARA CORP34 citations92
US5643056AJul 1, 1997
Revolving drum polishing apparatus
EBARA CORP26 citations91
US4688989AAug 25, 1987
Gas rotary machine
EBARA CORP21 citations82
US8025759B2Sep 27, 2011
Polishing apparatus and polishing method
EBARA CORP12 citations81
US7011569B2Mar 14, 2006
Method and apparatus for polishing workpiece
EBARA CORP6 citations74
US5827115AOct 27, 1998
Polishing apparatus
EBARA CORP15 citations74
US6183342B1Feb 6, 2001
Polishing apparatus
EBARA CORP10 citations73
US6148463ANov 21, 2000
Cleaning apparatus
EBARA CORP14 citations72
US5374170ADec 20, 1994
Screw vacuum pump
EBARA CORP4 citations63
US5314320AMay 24, 1994
Screw vacuum pump with a reduced starting load
EBARA CORP5 citations63
US7960188B2Jun 14, 2011
Polishing method
EBARA CORP3 citations62
US7780503B2Aug 24, 2010
Polishing apparatus and polishing method
EBARA CORP2 citations62
US10207390B2Feb 19, 2019
Processing end point detection method, polishing method, and polishing apparatus
EBARA CORP1 citations61