Inventor
TOMIOKA JUN
JP20 patents
Patents
20 patentsUS5407779AApr 18, 1995
Positive resist composition
SUMITOMO CHEMICAL CO61 citations96
US6068962AMay 30, 2000
Positive resist composition
SUMITOMO CHEMICAL CO14 citations73
US5726217AMar 10, 1998
Tetraphenol compounds and process for producing the same
SUMITOMO CHEMICAL CO10 citations73
US5587492ADec 24, 1996
Polyhydric phenol compound and positive resist composition comprising the same
SUMITOMO CHEMICAL CO4 citations73
US5436107AJul 25, 1995
Positive resist composition
SUMITOMO CHEMICAL CO12 citations73
US5407778AApr 18, 1995
Positive resist composition
SUMITOMO CHEMICAL CO12 citations73
US5290656AMar 1, 1994
Resist composition, novel phenol compound and quinone diazide sulfonic acid ester of novel phenol compound
SUMITOMO CHEMICAL CO12 citations73
US5080997AJan 14, 1992
Process for preparing a positive resist composition by mixing the condensation product of a quinone diazide sulfonyl halogenide and a phenol with a resin solution without isolating the condensation product from the crude mixture
SUMITOMO CHEMICAL CO13 citations73
US5218136AJun 8, 1993
Styryl compounds, process for preparing the same and photoresist compositions comprising the same
SUMITOMO CHEMICAL CO9 citations70
US6383709B2May 7, 2002
Positive resist composition comprising N-(n-octylsulfonyloxy) succinimide
SUMITOMO CHEMICAL CO2 citations63
US5965748AOct 12, 1999
Succinimide derivative, process for production and use thereof
SUMITOMO CHEMICAL CO2 citations62
US5556995ASep 17, 1996
Process for the preparation of polyhydric phenol compounds
SUMITOMO CHEMICAL CO4 citations62
US5413895AMay 9, 1995
Positive resist composition comprising a quinone diazide sulfonic acid ester, a novolak resin and a polyphenol compound.
SUMITOMO CHEMICAL CO4 citations62
US5354644AOct 11, 1994
Photoresist compositions comprising styryl compound
SUMITOMO CHEMICAL CO2 citations62
US5283324AFeb 1, 1994
Process for preparing radiation sensitive compound and positive resist composition
SUMITOMO CHEMICAL CO6 citations62
US5220027AJun 15, 1993
Sulfone-containing azamethide compounds with a nitrogen-containing aromatic ring of nitrogen containing aliphatic
SUMITOMO CHEMICAL CO3 citations61
US5136054AAug 4, 1992
Sulfone-containing azamethine compounds
SUMITOMO CHEMICAL CO2 citations61
US5061796AOct 29, 1991
Azamethine compounds
SUMITOMO CHEMICAL CO4 citations61
US5028708AJul 2, 1991
Azamethinyl quinoline derivatives
SUMITOMO CHEMICAL CO3 citations61
US5714620AFeb 3, 1998
Polyhydric phenol compound and positive resist composition comprising the same
SUMITOMO CHEMICAL CO0 citations51