Inventor
LOW KAH K
US3 patents
Patents
3 patentsUS5472811ADec 5, 1995
Phase shifting mask structure with multilayer optical coating for improved transmission
SEMATECH INC39 citations90
US5418095AMay 23, 1995
Method of fabricating phase shifters with absorbing/attenuating sidewalls using an additive process
SEMATECH INC43 citations90
US5411824AMay 2, 1995
Phase shifting mask structure with absorbing/attenuating sidewalls for improved imaging
SEMATECH INC38 citations90