Inventor

TAM ELISHA

US2 patents

Patents

2 patents

US10062587B2Aug 28, 2018

Pedestal with multi-zone temperature control and multiple purge capabilities

APPLIED MATERIALS INC96 citations96

US9267739B2Feb 23, 2016

Pedestal with multi-zone temperature control and multiple purge capabilities

APPLIED MATERIALS INC52 citations96