Inventor
EBINUMA RYUICHI
JP73 patents
Patents
50 patentsUS4680696AJul 14, 1987
Ink jet recorder with improved system for transporting ink to or from recording heads
CANON KK148 citations99
US5374829ADec 20, 1994
Vacuum chuck
CANON KK135 citations98
US5220171AJun 15, 1993
Wafer holding device in an exposure apparatus
CANON KK117 citations98
US4893137AJan 9, 1990
Recording apparatus and ink cartridge
CANON KK94 citations97
US6570645B2May 27, 2003
Stage system and stage driving method for use in exposure apparatus
CANON KK58 citations96
US6037680AMar 14, 2000
Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus
CANON KK55 citations96
US5917580AJun 29, 1999
Scan exposure method and apparatus
CANON KK80 citations96
US5796469AAug 18, 1998
Exposure apparatus and device manufacturing method using the same
CANON KK59 citations96
US5577552ANov 26, 1996
Temperature controlling device for mask and wafer holders
CANON KK95 citations96
US5552812ASep 3, 1996
Recording apparatus having an ink mist evacuation system
CANON KK68 citations96
US5467114ANov 14, 1995
Recording apparatus and ink cartridge
CANON KK72 citations96
US5413167AMay 9, 1995
Wafer cooling device
CANON KK75 citations96
US4977459ADec 11, 1990
Ink-jet recording apparatus with mechanism for automatically regulating a recording head
CANON KK123 citations96
US4947190AAug 7, 1990
Ink jet recording apparatus comprising mechanism for conveying sheet-like cleaning medium to a recording region, discharge recovery treatment method employed in the same, and cleaning sheet also employed in the same
CANON KK53 citations96
US4737801AApr 12, 1988
Ink supply device and an ink jet recording apparatus having the ink supply device
CANON KK106 citations96
US5822133AOct 13, 1998
Optical structure and device manufacturing method using the same
CANON KK99 citations95
US5524131AJun 4, 1996
Alignment apparatus and SOR x-ray exposure apparatus having same
CANON KK46 citations95
US6867848B2Mar 15, 2005
Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device
CANON KK47 citations94
US6750947B1Jun 15, 2004
Driving device and exposure apparatus
CANON KK23 citations93
US6396566B2May 28, 2002
Stage system for exposure apparatus and device manufacturing method in which a stage supporting member and a countermass supporting member provide vibration isolation
CANON KK44 citations93
US6252314B1Jun 26, 2001
Linear motor and stage system, and scanning exposure apparatus using the same
CANON KK29 citations93
US6133982AOct 17, 2000
Exposure apparatus
CANON KK26 citations93
US5822043AOct 13, 1998
Exposure method and projection exposure apparatus using the same
CANON KK19 citations93
US5760802AJun 2, 1998
Recording apparatus and ink cartridge
CANON KK24 citations93
US5593800AJan 14, 1997
Mask manufacturing method and apparatus and device manufacturing method using a mask manufactured by the method or apparatus
CANON KK52 citations93
US5537186AJul 16, 1996
Movable stage mechanism and exposure apparatus using the same
CANON KK32 citations93
US5448612ASep 5, 1995
X-ray exposure apparatus
CANON KK34 citations93
US5317615AMay 31, 1994
Exposure apparatus
CANON KK22 citations93
US5285488AFeb 8, 1994
Exposure apparatus
CANON KK33 citations93
US5245360ASep 14, 1993
Ink jet apparatus capable of mounting an ink tank and ink for use in same
CANON KK23 citations93
US5168512ADec 1, 1992
Method of manufacture of semiconductor devices
CANON KK26 citations93
US5159621AOct 27, 1992
X-ray transmitting window and method of mounting the same
CANON KK22 citations93
US5157700AOct 20, 1992
Exposure apparatus for controlling intensity of exposure radiation
CANON KK41 citations93
US5150391ASep 22, 1992
Exposure apparatus
CANON KK28 citations93
US5140429AAug 18, 1992
Ink-jet recording apparatus with mechanism for automatically regulating a recording head
CANON KK22 citations93
US5128975AJul 7, 1992
X-ray exposure system
CANON KK28 citations93
US5008688AApr 16, 1991
Ink jet recording apparatus capable of mounting an ink tank and ink tank for use in same
CANON KK42 citations93
US4748459AMay 31, 1988
Ink jet recording apparatus and capping device
CANON KK26 citations93
US4704620ANov 3, 1987
Temperature control system and ink jet printer utilizing the temperature control system
CANON KK48 citations93
US4610202ASep 9, 1986
Ink reservoir
CANON KK38 citations93
US6144504ANov 7, 2000
Projection and exposure apparatus including an optical member and a holding member
CANON KK25 citations92
US5933215AAug 3, 1999
Exposure apparatus and device manufacturing method using the same
CANON KK50 citations92
US5822389AOct 13, 1998
Alignment apparatus and SOR X-ray exposure apparatus having same
CANON KK36 citations92
US5800949ASep 1, 1998
Mask, method of producing a device using the mask and aligner with the mask
CANON KK25 citations92
US5377251ADec 27, 1994
Exposure apparatus
CANON KK26 citations92
US5172402ADec 15, 1992
Exposure apparatus
CANON KK33 citations92
US5138643AAug 11, 1992
Exposure apparatus
CANON KK42 citations92
US5123036AJun 16, 1992
X-ray exposure apparatus
CANON KK32 citations92
US5112133AMay 12, 1992
Alignment system
CANON KK42 citations92
US4651173AMar 17, 1987
Continuous-form recorder having decrumpling means for removing creases in the form
CANON KK26 citations92
Showing the top 50 of 73 patents by PatentIndex Score.