P

Inventor

SAGO HIROYOSHI

JP20 patents
⚠️ This page may combine multiple inventors who share the name “SAGO HIROYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO OHKA KOGYO CO LTD

16 patents
US5571324ANov 5, 1996

Rotary-cup coating apparatus

TOKYO OHKA KOGYO CO LTD110 citations96
US5349978ASep 27, 1994

Cleaning device for cleaning planar workpiece

TOKYO OHKA KOGYO CO LTD140 citations95
US5439519AAug 8, 1995

Solution applying apparatus

TOKYO OHKA KOGYO CO LTD58 citations94
US5972426AOct 26, 1999

Method of coating substrate with coating nozzle

TOKYO OHKA KOGYO CO LTD31 citations92
US5769946AJun 23, 1998

Coating nozzle and coating device having coating nozzle

TOKYO OHKA KOGYO CO LTD27 citations92
US5238713AAug 24, 1993

Spin-on method and apparatus for applying coating material to a substrate, including an air flow developing and guiding step/means

TOKYO OHKA KOGYO CO LTD29 citations91
US5116250AMay 26, 1992

Method and apparatus for applying a coating material to a substrate

TOKYO OHKA KOGYO CO LTD24 citations91
US4941426AJul 17, 1990

Thin-film coating apparatus

TOKYO OHKA KOGYO CO LTD23 citations91
US5415691AMay 16, 1995

Solution coating apparatus

TOKYO OHKA KOGYO CO LTD27 citations90
US6436472B1Aug 20, 2002

Method of applying a coating solution to a substrate surface using a rotary coater

TOKYO OHKA KOGYO CO LTD10 citations73
US5785759AJul 28, 1998

Rotating cup type liquid supply device

TOKYO OHKA KOGYO CO LTD7 citations73
US5332557AJul 26, 1994

Heating apparatus

TOKYO OHKA KOGYO CO LTD15 citations73
US5660634AAug 26, 1997

Rotary-cup liquid supply device

TOKYO OHKA KOGYO CO LTD16 citations71
US6277441B1Aug 21, 2001

Method of forming coating film on a substrate

TOKYO OHKA KOGYO CO LTD3 citations62
US6090216AJul 18, 2000

Cleaning device and cleaning method for applicator nozzle

TOKYO OHKA KOGYO CO LTD6 citations60
US6761930B2Jul 13, 2004

Method of coating solution on substrate surface using a slit nozzle

TOKYO OHKA KOGYO CO LTD1 citations51

TAZMO CO LTD

1 patent

TOKYO DENSHI KAGAKU KK

1 patent

UNIV TOKYO METROPOLITAN

1 patent

TOKYO OHKO KOGYO CO LTD

1 patent