Inventor
SAGO HIROYOSHI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “SAGO HIROYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
16 patentsUS5571324ANov 5, 1996
Rotary-cup coating apparatus
TOKYO OHKA KOGYO CO LTD110 citations96
US5349978ASep 27, 1994
Cleaning device for cleaning planar workpiece
TOKYO OHKA KOGYO CO LTD140 citations95
US5439519AAug 8, 1995
Solution applying apparatus
TOKYO OHKA KOGYO CO LTD58 citations94
US5972426AOct 26, 1999
Method of coating substrate with coating nozzle
TOKYO OHKA KOGYO CO LTD31 citations92
US5769946AJun 23, 1998
Coating nozzle and coating device having coating nozzle
TOKYO OHKA KOGYO CO LTD27 citations92
US5238713AAug 24, 1993
Spin-on method and apparatus for applying coating material to a substrate, including an air flow developing and guiding step/means
TOKYO OHKA KOGYO CO LTD29 citations91
US5116250AMay 26, 1992
Method and apparatus for applying a coating material to a substrate
TOKYO OHKA KOGYO CO LTD24 citations91
US4941426AJul 17, 1990
Thin-film coating apparatus
TOKYO OHKA KOGYO CO LTD23 citations91
US5415691AMay 16, 1995
Solution coating apparatus
TOKYO OHKA KOGYO CO LTD27 citations90
US6436472B1Aug 20, 2002
Method of applying a coating solution to a substrate surface using a rotary coater
TOKYO OHKA KOGYO CO LTD10 citations73
US5785759AJul 28, 1998
Rotating cup type liquid supply device
TOKYO OHKA KOGYO CO LTD7 citations73
US5332557AJul 26, 1994
Heating apparatus
TOKYO OHKA KOGYO CO LTD15 citations73
US5660634AAug 26, 1997
Rotary-cup liquid supply device
TOKYO OHKA KOGYO CO LTD16 citations71
US6277441B1Aug 21, 2001
Method of forming coating film on a substrate
TOKYO OHKA KOGYO CO LTD3 citations62
US6090216AJul 18, 2000
Cleaning device and cleaning method for applicator nozzle
TOKYO OHKA KOGYO CO LTD6 citations60
US6761930B2Jul 13, 2004
Method of coating solution on substrate surface using a slit nozzle
TOKYO OHKA KOGYO CO LTD1 citations51