Inventor
KUDO KATSUHIKO
JP5 patents
Patents
5 patentsUS5571324ANov 5, 1996
Rotary-cup coating apparatus
TOKYO OHKA KOGYO CO LTD110 citations96
US5349978ASep 27, 1994
Cleaning device for cleaning planar workpiece
TOKYO OHKA KOGYO CO LTD140 citations95
US5238713AAug 24, 1993
Spin-on method and apparatus for applying coating material to a substrate, including an air flow developing and guiding step/means
TOKYO OHKA KOGYO CO LTD29 citations91
US5116250AMay 26, 1992
Method and apparatus for applying a coating material to a substrate
TOKYO OHKA KOGYO CO LTD24 citations91
US4941426AJul 17, 1990
Thin-film coating apparatus
TOKYO OHKA KOGYO CO LTD23 citations91