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Inventor
SU JIANNONG
CN
2 patents
Patents
2 patents
US7442637B2
Oct 28, 2008
Method for processing IC designs for different metal BEOL processes
CHARTERED SEMICONDUCTOR MFG
21 citations
90
US7381646B2
Jun 3, 2008
Method for using a Cu BEOL process to fabricate an integrated circuit (IC) originally having an al design
CHARTERED SEMICONDUCTOR MFG
9 citations
81