Inventor
VEYTSER ALEXANDER M
US13 patents
Patents
13 patentsUS6108189AAug 22, 2000
Electrostatic chuck having improved gas conduits
APPLIED MATERIALS INC255 citations99
US6721162B2Apr 13, 2004
Electrostatic chuck having composite dielectric layer and method of manufacture
APPLIED MATERIALS INC76 citations98
US6503368B1Jan 7, 2003
Substrate support having bonded sections and method
APPLIED MATERIALS INC76 citations98
US6310755B1Oct 30, 2001
Electrostatic chuck having gas cavity and method
APPLIED MATERIALS INC325 citations98
US6538872B1Mar 25, 2003
Electrostatic chuck having heater and method
APPLIED MATERIALS INC123 citations97
US6490146B2Dec 3, 2002
Electrostatic chuck bonded to base with a bond layer and method
APPLIED MATERIALS INC88 citations97
US6478924B1Nov 12, 2002
Plasma chamber support having dual electrodes
APPLIED MATERIALS INC124 citations97
US6094334AJul 25, 2000
Polymer chuck with heater and method of manufacture
APPLIED MATERIALS INC97 citations97
US6583980B1Jun 24, 2003
Substrate support tolerant to thermal expansion stresses
APPLIED MATERIALS INC60 citations96
US6462928B1Oct 8, 2002
Electrostatic chuck having improved electrical connector and method
APPLIED MATERIALS INC65 citations96
US6414834B1Jul 2, 2002
Dielectric covered electrostatic chuck
APPLIED MATERIALS INC56 citations96
US6494958B1Dec 17, 2002
Plasma chamber support with coupled electrode
APPLIED MATERIALS INC74 citations94
US5801915ASep 1, 1998
Electrostatic chuck having a unidirectionally conducting coupler layer
APPLIED MATERIALS INC49 citations92