Inventor
GUCKEL HENRY
US29 patents
⚠️ This page may combine multiple inventors who share the name “GUCKEL HENRY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WISCONSIN ALUMNI RES FOUND
27 patentsUS5190637AMar 2, 1993
Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers
WISCONSIN ALUMNI RES FOUND460 citations99
US4897360AJan 30, 1990
Polysilicon thin film process
WISCONSIN ALUMNI RES FOUND216 citations99
US4744863AMay 17, 1988
Sealed cavity semiconductor pressure transducers and method of producing the same
WISCONSIN ALUMNI RES FOUND189 citations99
US5866281AFeb 2, 1999
Alignment method for multi-level deep x-ray lithography utilizing alignment holes and posts
WISCONSIN ALUMNI RES FOUND136 citations98
US5576147ANov 19, 1996
Formation of microstructures using a preformed photoresist sheet
WISCONSIN ALUMNI RES FOUND126 citations98
US5378583AJan 3, 1995
Formation of microstructures using a preformed photoresist sheet
WISCONSIN ALUMNI RES FOUND203 citations98
US5206983AMay 4, 1993
Method of manufacturing micromechanical devices
WISCONSIN ALUMNI RES FOUND179 citations98
US4996082AFeb 26, 1991
Sealed cavity semiconductor pressure transducers and method of producing the same
WISCONSIN ALUMNI RES FOUND128 citations98
US4853669AAug 1, 1989
Sealed cavity semiconductor pressure transducers and method of producing the same
WISCONSIN ALUMNI RES FOUND131 citations98
US5644177AJul 1, 1997
Micromechanical magnetically actuated devices
WISCONSIN ALUMNI RES FOUND163 citations97
US5188983AFeb 23, 1993
Polysilicon resonating beam transducers and method of producing the same
WISCONSIN ALUMNI RES FOUND179 citations97
US5090254AFeb 25, 1992
Polysilicon resonating beam transducers
WISCONSIN ALUMNI RES FOUND162 citations97
US5189777AMar 2, 1993
Method of producing micromachined differential pressure transducers
WISCONSIN ALUMNI RES FOUND94 citations96
US5908719AJun 1, 1999
Radiation mask adapted to be aligned with a photoresist layer and method of making the same
WISCONSIN ALUMNI RES FOUND88 citations95
US5718618AFeb 17, 1998
Lapping and polishing method and apparatus for planarizing photoresist and metal microstructure layers
WISCONSIN ALUMNI RES FOUND146 citations95
US5496668AMar 5, 1996
Formation of microstructures using a preformed photoresist sheet
WISCONSIN ALUMNI RES FOUND70 citations95
US5327033AJul 5, 1994
Micromechanical magnetic devices
WISCONSIN ALUMNI RES FOUND62 citations95
US6133615AOct 17, 2000
Photodiode arrays having minimized cross-talk between diodes
WISCONSIN ALUMNI RES FOUND71 citations94
US5357807AOct 25, 1994
Micromachined differential pressure transducers
WISCONSIN ALUMNI RES FOUND140 citations94
US5013693AMay 7, 1991
Formation of microstructures with removal of liquid by freezing and sublimation
WISCONSIN ALUMNI RES FOUND52 citations94
US4203128AMay 13, 1980
Electrostatically deformable thin silicon membranes
WISCONSIN ALUMNI RES FOUND122 citations93
US5808384ASep 15, 1998
Single coil bistable, bidirectional micromechanical actuator
WISCONSIN ALUMNI RES FOUND47 citations92
US6087743AJul 11, 2000
Position control system for use with micromechanical actuators
WISCONSIN ALUMNI RES FOUND38 citations89
US4234361ANov 18, 1980
Process for producing an electrostatically deformable thin silicon membranes utilizing a two-stage diffusion step to form an etchant resistant layer
WISCONSIN ALUMNI RES FOUND35 citations89
US4658279AApr 14, 1987
Velocity saturated strain sensitive semiconductor devices
WISCONSIN ALUMNI RES FOUND22 citations82
US5679502AOct 21, 1997
Method and apparatus for micromachining using hard X-rays
WISCONSIN ALUMNI RES FOUND13 citations71
US6607305B2Aug 19, 2003
Bi-directional micromechanical latching linear actuator
WISCONSIN ALUMNI RES FOUND6 citations63