Inventor
MEDVEDEVA MARINA
RU6 patents
⚠️ This page may combine multiple inventors who share the name “MEDVEDEVA MARINA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
4 patentsUS6854104B2Feb 8, 2005
First approximation for OPC significant speed-up
LSI LOGIC CORP13 citations74
US6813758B2Nov 2, 2004
Optical proximity correction driven hierarchy
LSI LOGIC CORP7 citations71
US7340706B2Mar 4, 2008
Method and system for analyzing the quality of an OPC mask
LSI LOGIC CORP7 citations69
US6911285B2Jun 28, 2005
Sidelobe correction for attenuated phase shift masks
LSI LOGIC CORP4 citations57