Inventor

CHONAN JUNICHI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “CHONAN JUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

2 patents

US9753378B2Sep 5, 2017

Exposure apparatus, exposure method, and device manufacturing method

NIKON CORP1 citations55

US10310383B2Jun 4, 2019

Exposure apparatus, exposure method, and device manufacturing method

NIKON CORP0 citations44

CHONAN JUNICHI

1 patent

US9041902B2May 26, 2015

Exposure apparatus, exposure method, and device manufacturing method

CHONAN JUNICHI1 citations49

SUGAYA ISAO

1 patent

US9054140B2Jun 9, 2015

Substrate holder system, substrate holder, fastening mechanism, substrate bonding apparatus and method for manufacturing devices

SUGAYA ISAO0 citations37