Inventor
NGO SURE K
US3 patents
Patents
3 patentsUS11600486B2Mar 7, 2023
Systems and methods for depositing low-κdielectric films
APPLIED MATERIALS INC2 citations71
US12119223B2Oct 15, 2024
Single precursor low-k film deposition and UV cure for advanced technology node
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US11572622B2Feb 7, 2023
Systems and methods for cleaning low-k deposition chambers
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