Inventor
KITAYAMA TOMOHISA
JP3 patents
Patents
3 patentsUS11019285B2May 25, 2021
Calibration method of infrared camera and calibration system of infrared camera
TOKYO ELECTRON LTD0 citations56
US12575003B2Mar 10, 2026
Model-based control method, model-based control system, and storage medium
TOKYO ELECTRON LTD0 citations46
US11923211B2Mar 5, 2024
Correction data creating method, substrate processing method, and substrate processing system
TOKYO ELECTRON LTD0 citations46