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Inventor
SUN CHIEN-JUNG
TW
2 patents
Patents
2 patents
US7232718B2
Jun 19, 2007
Method for forming a deep trench capacitor buried plate
NANYA TECHNOLOGY CORP
4 citations
59
US7101802B2
Sep 5, 2006
Method for forming bottle-shaped trench
NANYA TECHNOLOGY CORP
0 citations
44