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Inventor
GRINOLDS HUGH R
US
2 patents
⚠️ This page may combine multiple inventors who share the name “GRINOLDS HUGH R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
1 patent
US7193228B2
Mar 20, 2007
EUV light source optical elements
CYMER INC
38 citations
91
HEWLETT PACKARD CO
1 patent
US4575402A
Mar 11, 1986
Method for fabricating conductors in integrated circuits
HEWLETT PACKARD CO
11 citations
65