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Inventor
KOOPMANN CHRISTOPH
DE
2 patents
Patents
2 patents
US7204963B2
Apr 17, 2007
Process for the separation of chlorosilanes from gas streams
DEGUSSA
25 citations
89
US6680038B2
Jan 20, 2004
Process for the separation of chlorosilanes from gas streams
DEGUSSA
21 citations
89