Inventor

STAWASZ MICHELE

US4 patents

⚠️ This page may combine multiple inventors who share the name “STAWASZ MICHELE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED TECH MATERIALS

3 patents

US7475588B2Jan 13, 2009

Apparatus and process for sensing fluoro species in semiconductor processing systems

ADVANCED TECH MATERIALS474 citations98

US7296460B2Nov 20, 2007

Apparatus and process for sensing fluoro species in semiconductor processing systems

ADVANCED TECH MATERIALS481 citations98

US7080545B2Jul 25, 2006

Apparatus and process for sensing fluoro species in semiconductor processing systems

ADVANCED TECH MATERIALS495 citations98

DIMEO JR FRANK

1 patent

US8109130B2Feb 7, 2012

Apparatus and process for sensing fluoro species in semiconductor processing systems

DIMEO JR FRANK8 citations79