Inventor
MAEDA AKIHO
JP3 patents
Patents
3 patentsUS5248378ASep 28, 1993
Method and apparatus for producing silicon single crystal
SHINETSU HANDOTAI KK62 citations94
US5089238AFeb 18, 1992
Method of forming a temperature pattern of heater and silicon single crystal growth control apparatus using the temperature pattern
SHINETSU HANDOTAI KK22 citations91
US5223078AJun 29, 1993
Conical portion growth control method and apparatus
SHINETSU HANDOTAI KK16 citations71