Inventor
MINVIELLE ANNA M
US7 patents
⚠️ This page may combine multiple inventors who share the name “MINVIELLE ANNA M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
6 patentsUS6255125B1Jul 3, 2001
Method and apparatus for compensating for critical dimension variations in the production of a semiconductor wafer
ADVANCED MICRO DEVICES INC47 citations91
US7538026B1May 26, 2009
Multilayer low reflectivity hard mask and process therefor
ADVANCED MICRO DEVICES INC8 citations83
US7427457B1Sep 23, 2008
Methods for designing grating structures for use in situ scatterometry to detect photoresist defects
ADVANCED MICRO DEVICES INC11 citations83
US5985498ANov 16, 1999
Method of characterizing linewidth errors in a scanning lithography system
ADVANCED MICRO DEVICES INC13 citations72
US7384725B2Jun 10, 2008
System and method for fabricating contact holes
ADVANCED MICRO DEVICES INC3 citations62
US8048797B2Nov 1, 2011
Multilayer low reflectivity hard mask and process therefor
ADVANCED MICRO DEVICES INC0 citations51