Inventor
KENWORTHY IAN J
US7 patents
⚠️ This page may combine multiple inventors who share the name “KENWORTHY IAN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS9099398B2Aug 4, 2015
Gas distribution showerhead for inductively coupled plasma etch reactor
LAM RES CORP41 citations97
US9934979B2Apr 3, 2018
Gas distribution showerhead for inductively coupled plasma etch reactor
LAM RES CORP4 citations72
US10074521B2Sep 11, 2018
Replaceable upper chamber parts of plasma processing apparatus
LAM RES CORP0 citations49
KENWORTHY IAN J
2 patentsUS8128750B2Mar 6, 2012
Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the components
KENWORTHY IAN J12 citations77
US8282987B2Oct 9, 2012
Aluminum-plated components of semiconductor material and methods of manufacturing the components
KENWORTHY IAN J3 citations56