Inventor
OH BEOMJEONG
KR6 patents
Patents
6 patentsUS11485132B2Nov 1, 2022
Method of maintaining an ink jet head and printing method using an ink jet head
SEMES CO LTD2 citations70
US12558898B2Feb 24, 2026
Chemical liquid removing unit, device for supplying chemical liquid and method of removing chemical liquid
SEMES CO LTD0 citations59
US11312127B2Apr 26, 2022
Apparatus for discharging chemical liquid and method of discharging chemical liquid
SEMES CO LTD0 citations59
US12554160B2Feb 17, 2026
Treatment liquid ejection method and apparatus
SEMES CO LTD0 citations52
US11121007B2Sep 14, 2021
Apparatus for supplying chemical liquid
SEMES CO LTD0 citations52
US12466206B2Nov 11, 2025
Substrate processing apparatus control system and substrate processing apparatus control method
SEMES CO LTD0 citations38