Inventor
METZ DAVID ALAN
US3 patents
Patents
3 patentsUS10991550B2Apr 27, 2021
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
LAM RES CORP7 citations81
US12586757B2Mar 24, 2026
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
LAM RES CORP0 citations59
US11594397B2Feb 28, 2023
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
LAM RES CORP0 citations59