Inventor
CHANDRACHOOD MADHAVI
US14 patents
⚠️ This page may combine multiple inventors who share the name “CHANDRACHOOD MADHAVI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS6106634AAug 22, 2000
Methods and apparatus for reducing particle contamination during wafer transport
APPLIED MATERIALS INC83 citations95
US6135868AOct 24, 2000
Groove cleaning device for chemical-mechanical polishing
APPLIED MATERIALS INC49 citations93
US6572453B1Jun 3, 2003
Multi-fluid polishing process
APPLIED MATERIALS INC25 citations92
US6432826B1Aug 13, 2002
Planarized Cu cleaning for reduced defects
APPLIED MATERIALS INC35 citations92
US6192601B1Feb 27, 2001
Method and apparatus for reducing particle contamination during wafer transport
APPLIED MATERIALS INC26 citations92
US6371836B1Apr 16, 2002
Groove cleaning device for chemical-mechanical polishing
APPLIED MATERIALS INC26 citations90
US6921494B2Jul 26, 2005
Backside etching in a scrubber
APPLIED MATERIALS INC8 citations73
US6558471B2May 6, 2003
Scrubber operation
APPLIED MATERIALS INC10 citations71
US5777245AJul 7, 1998
Particle dispersing system and method for testing semiconductor manufacturing equipment
APPLIED MATERIALS INC9 citations70
US7104267B2Sep 12, 2006
Planarized copper cleaning for reduced defects
APPLIED MATERIALS INC3 citations63
US7829243B2Nov 9, 2010
Method for plasma etching a chromium layer suitable for photomask fabrication
APPLIED MATERIALS INC4 citations60
US7790334B2Sep 7, 2010
Method for photomask plasma etching using a protected mask
APPLIED MATERIALS INC1 citations52