Inventor
KOROVIN NIKOLAY N
US12 patents
⚠️ This page may combine multiple inventors who share the name “KOROVIN NIKOLAY N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM IPEC CORP
10 patentsUS6736952B2May 18, 2004
Method and apparatus for electrochemical planarization of a workpiece
SPEEDFAM IPEC CORP155 citations98
US6659850B2Dec 9, 2003
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP97 citations98
US6390905B1May 21, 2002
Workpiece carrier with adjustable pressure zones and barriers
SPEEDFAM IPEC CORP137 citations98
US7140956B1Nov 28, 2006
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP67 citations97
US6612903B2Sep 2, 2003
Workpiece carrier with adjustable pressure zones and barriers
SPEEDFAM IPEC CORP40 citations95
US6582277B2Jun 24, 2003
Method for controlling a process in a multi-zonal apparatus
SPEEDFAM IPEC CORP23 citations92
US7025664B2Apr 11, 2006
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP10 citations73
US6974525B2Dec 13, 2005
Method and apparatus for electrochemical planarization of a workpiece
SPEEDFAM IPEC CORP7 citations73
US6336853B1Jan 8, 2002
Carrier having pistons for distributing a pressing force on the back surface of a workpiece
SPEEDFAM IPEC CORP10 citations73
US7014541B2Mar 21, 2006
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP1 citations62