Inventor
SCHULTZ STEPHEN C
US20 patents
⚠️ This page may combine multiple inventors who share the name “SCHULTZ STEPHEN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM IPEC CORP
15 patentsUS6659850B2Dec 9, 2003
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP97 citations98
US6390905B1May 21, 2002
Workpiece carrier with adjustable pressure zones and barriers
SPEEDFAM IPEC CORP137 citations98
US7140956B1Nov 28, 2006
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP67 citations97
US6612903B2Sep 2, 2003
Workpiece carrier with adjustable pressure zones and barriers
SPEEDFAM IPEC CORP40 citations95
US6878039B2Apr 12, 2005
Polishing pad window for a chemical-mechanical polishing tool
SPEEDFAM IPEC CORP20 citations92
US6540592B1Apr 1, 2003
Carrier head with reduced moment wear ring
SPEEDFAM IPEC CORP29 citations92
US6500055B1Dec 31, 2002
Oscillating orbital polisher and method
SPEEDFAM IPEC CORP21 citations92
US6184139B1Feb 6, 2001
Oscillating orbital polisher and method
SPEEDFAM IPEC CORP33 citations92
US6758939B2Jul 6, 2004
Laminated wear ring
SPEEDFAM IPEC CORP22 citations90
US6447379B1Sep 10, 2002
Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method therefor
SPEEDFAM IPEC CORP52 citations90
US7025664B2Apr 11, 2006
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP10 citations73
US6790123B2Sep 14, 2004
Method for processing a work piece in a multi-zonal processing apparatus
SPEEDFAM IPEC CORP7 citations73
US6336853B1Jan 8, 2002
Carrier having pistons for distributing a pressing force on the back surface of a workpiece
SPEEDFAM IPEC CORP10 citations73
US7014541B2Mar 21, 2006
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP1 citations62
US6568991B2May 27, 2003
Method and apparatus for sensing a wafer in a carrier
SPEEDFAM IPEC CORP4 citations57
NOVELLUS SYSTEMS INC
3 patentsUS7402098B2Jul 22, 2008
Carrier head for workpiece planarization/polishing
NOVELLUS SYSTEMS INC31 citations90
US7335092B1Feb 26, 2008
Carrier head for workpiece planarization/polishing
NOVELLUS SYSTEMS INC7 citations71
US7040957B2May 9, 2006
Platen and manifold for polishing workpieces
NOVELLUS SYSTEMS INC3 citations62