Inventor
HERB JOHN D
US14 patents
⚠️ This page may combine multiple inventors who share the name “HERB JOHN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM IPEC CORP
12 patentsUS6659850B2Dec 9, 2003
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP97 citations98
US6390905B1May 21, 2002
Workpiece carrier with adjustable pressure zones and barriers
SPEEDFAM IPEC CORP137 citations98
US7140956B1Nov 28, 2006
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP67 citations97
US6612903B2Sep 2, 2003
Workpiece carrier with adjustable pressure zones and barriers
SPEEDFAM IPEC CORP40 citations95
US6878039B2Apr 12, 2005
Polishing pad window for a chemical-mechanical polishing tool
SPEEDFAM IPEC CORP20 citations92
US6540592B1Apr 1, 2003
Carrier head with reduced moment wear ring
SPEEDFAM IPEC CORP29 citations92
US6447379B1Sep 10, 2002
Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method therefor
SPEEDFAM IPEC CORP52 citations90
US6913528B2Jul 5, 2005
Low amplitude, high speed polisher and method
SPEEDFAM IPEC CORP13 citations84
US7025664B2Apr 11, 2006
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP10 citations73
US6336853B1Jan 8, 2002
Carrier having pistons for distributing a pressing force on the back surface of a workpiece
SPEEDFAM IPEC CORP10 citations73
US7014541B2Mar 21, 2006
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP1 citations62
US6568991B2May 27, 2003
Method and apparatus for sensing a wafer in a carrier
SPEEDFAM IPEC CORP4 citations57