Inventor
FARMER JAMES L
US10 patents
⚠️ This page may combine multiple inventors who share the name “FARMER JAMES L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM IPEC CORP
8 patentsUS6659850B2Dec 9, 2003
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP97 citations98
US6390905B1May 21, 2002
Workpiece carrier with adjustable pressure zones and barriers
SPEEDFAM IPEC CORP137 citations98
US7140956B1Nov 28, 2006
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP67 citations97
US6612903B2Sep 2, 2003
Workpiece carrier with adjustable pressure zones and barriers
SPEEDFAM IPEC CORP40 citations95
US6752442B2Jun 22, 2004
Workpiece handling end-effector and a method for processing workpieces using a workpiece handling end-effector
SPEEDFAM IPEC CORP26 citations88
US7025664B2Apr 11, 2006
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP10 citations73
US7014541B2Mar 21, 2006
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
SPEEDFAM IPEC CORP1 citations62
US6979034B2Dec 27, 2005
Workpiece handling end-effector and a method for processing workpieces using a workpiece handling end-effector
SPEEDFAM IPEC CORP2 citations58