Inventor
MARUNO SHIGEMITSU
JP4 patents
⚠️ This page may combine multiple inventors who share the name “MARUNO SHIGEMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
3 patentsUS6228728B1May 8, 2001
Method of fabricating semiconductor device
MITSUBISHI ELECTRIC CORP35 citations91
US6635938B1Oct 21, 2003
Semiconductor device and manufacturing method thereof
MITSUBISHI ELECTRIC CORP19 citations83
US6373108B1Apr 16, 2002
Semiconductor device having reduced sheet resistance of source/drain regions
MITSUBISHI ELECTRIC CORP5 citations61