Inventor
JIMBO NAOYUKI
JP4 patents
Patents
4 patentsUS7040963B1May 9, 2006
Table of wafer polishing apparatus, method for polishing semiconductor wafer, and method for manufacturing semiconductor wafer
IBIDEN CO LTD19 citations89
US6475068B1Nov 5, 2002
Wafer holding plate for wafer grinding apparatus and method for manufacturing the same
IBIDEN CO LTD14 citations89
US7029379B2Apr 18, 2006
Wafer holding plate for wafer grinding apparatus and method for manufacturing the same
IBIDEN CO LTD0 citations48
US6916228B2Jul 12, 2005
Wafer holding plate for wafer grinding apparatus and method for manufacturing the same
IBIDEN CO LTD0 citations48