Inventor
MISHIMA ATSUSHI
JP3 patents
Patents
3 patentsUS6475068B1Nov 5, 2002
Wafer holding plate for wafer grinding apparatus and method for manufacturing the same
IBIDEN CO LTD14 citations89
US7029379B2Apr 18, 2006
Wafer holding plate for wafer grinding apparatus and method for manufacturing the same
IBIDEN CO LTD0 citations48
US6916228B2Jul 12, 2005
Wafer holding plate for wafer grinding apparatus and method for manufacturing the same
IBIDEN CO LTD0 citations48