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Inventor
SMEDLEY BENJAMIN C
US
2 patents
⚠️ This page may combine multiple inventors who share the name “SMEDLEY BENJAMIN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
STRASBAUGH
1 patent
US9393669B2
Jul 19, 2016
Systems and methods of processing substrates
STRASBAUGH
5 citations
68
SCHRAUB FREDERIC ANTHONY
1 patent
US8520222B2
Aug 27, 2013
System and method for in situ monitoring of top wafer thickness in a stack of wafers
SCHRAUB FREDERIC ANTHONY
4 citations
48