Inventor · disambiguated record

Janusz Schulz

Also filed as: SCHULZ JANUSZ

1 granted patent·0 citations·filing 2016–2016

11Inventor score

Technology areasH10P

Files withSUSS MICROTEC LITHOGRAPHY GMBH1

Top patents by PatentIndex Score

1 record

0135US9958795B2Spacer displacement device for a wafer illumination unit and wafer illumination unitSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2016·Granted May 1, 2018·0 cites·24 claims

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