Inventor
TARAVADE KUNAL
US6 patents
Patents
6 patentsUS6441419B1Aug 27, 2002
Encapsulated-metal vertical-interdigitated capacitor and damascene method of manufacturing same
LSI LOGIC CORP91 citations96
US6775818B2Aug 10, 2004
Device parameter and gate performance simulation based on wafer image prediction
LSI LOGIC CORP57 citations93
US7149340B2Dec 12, 2006
Mask defect analysis for both horizontal and vertical processing effects
LSI LOGIC CORP12 citations82
US6864020B1Mar 8, 2005
Chromeless phase shift mask using non-linear optical materials
LSI LOGIC CORP13 citations82
US6225215B1May 1, 2001
Method for enhancing anti-reflective coatings used in photolithography of electronic devices
LSI LOGIC CORP8 citations68
US6527867B1Mar 4, 2003
Method for enhancing anti-reflective coatings used in photolithography of electronic devices
LSI LOGIC CORP0 citations47