Inventor
MIYASHITA KOICHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “MIYASHITA KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS11823877B2Nov 21, 2023
Substrate processing system, substrate processing method, and controller
TOKYO ELECTRON LTD0 citations57
US11276592B2Mar 15, 2022
Processing apparatus and processing method
TOKYO ELECTRON LTD0 citations48
US12595563B2Apr 7, 2026
Substrate processing method
TOKYO ELECTRON LTD0 citations42