Inventor
DENG YANPEI
US3 patents
Patents
3 patentsUS6444495B1Sep 3, 2002
Dielectric films for narrow gap-fill applications
HONEYWELL INT INC95 citations96
US6653718B2Nov 25, 2003
Dielectric films for narrow gap-fill applications
HONEYWELL INT INC38 citations91
US6967172B2Nov 22, 2005
Colloidal silica composite films for premetal dielectric applications
HONEYWELL INT INC15 citations82