Inventor
TOMIOKA KENYA
JP7 patents
Patents
7 patentsUS6558518B1May 6, 2003
Method and apparatus for plating substrate and plating facility
EBARA CORP36 citations91
US6660139B1Dec 9, 2003
Plating apparatus and method
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US6365020B1Apr 2, 2002
Wafer plating jig
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US6500317B1Dec 31, 2002
Plating apparatus for detecting the conductivity between plating contacts on a substrate
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US7241372B2Jul 10, 2007
Plating apparatus and plating liquid removing method
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US6689216B2Feb 10, 2004
Plating apparatus and plating liquid removing method
EBARA CORP5 citations71
US7166204B2Jan 23, 2007
Plating apparatus and method
EBARA CORP4 citations61