Inventor
SIMON JOSEPH P
US3 patents
Patents
3 patentsUS6896586B2May 24, 2005
Method and apparatus for heating polishing pad
LAM RES CORP26 citations89
US6609952B1Aug 26, 2003
Chemical mechanical planarization (CMP) system and method for determining an endpoint in a CMP operation
LAM RES CORP13 citations79
US6749483B2Jun 15, 2004
Chemical mechanical planarization (CMP) system and method for determining an endpoint in a CMP operation
LAM RES CORP4 citations57