Inventor
PROCTOR PAUL
SG10 patents
⚠️ This page may combine multiple inventors who share the name “PROCTOR PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
7 patentsUS6830971B2Dec 14, 2004
High K artificial lattices for capacitor applications to use in CU or AL BEOL
CHARTERED SEMICONDUCTOR MFG26 citations92
US6673695B1Jan 6, 2004
STI scheme to prevent fox recess during pre-CMP HF dip
CHARTERED SEMICONDUCTOR MFG19 citations83
US6663472B2Dec 16, 2003
Multiple step CMP polishing
CHARTERED SEMICONDUCTOR MFG16 citations83
US6664190B2Dec 16, 2003
Pre STI-CMP planarization scheme
CHARTERED SEMICONDUCTOR MFG16 citations79
US6660642B2Dec 9, 2003
Toxic residual gas removal by non-reactive ion sputtering
CHARTERED SEMICONDUCTOR MFG7 citations69
US7095073B2Aug 22, 2006
High K artificial lattices for capacitor applications to use in Cu or Al BEOL
CHARTERED SEMICONDUCTOR MFG4 citations62
US6726545B2Apr 27, 2004
Linear polishing for improving substrate uniformity
CHARTERED SEMICONDUCTOR MFG4 citations59