Inventor
HAYASHI NAOYA
JP12 patents
⚠️ This page may combine multiple inventors who share the name “HAYASHI NAOYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON PRINTING CO LTD
6 patentsUS5916712AJun 29, 1999
Halftone phase shift photomask, halftone phase shift photomask blank, and method of producing the same
DAINIPPON PRINTING CO LTD19 citations92
US5738959AApr 14, 1998
Halftone phase shift photomask, halftone phase shift photomask blank, and method of producing the same comprising fluorine in phase shift layer
DAINIPPON PRINTING CO LTD21 citations92
US5725975AMar 10, 1998
Gradation mask and process for producing the same
DAINIPPON PRINTING CO LTD31 citations92
US6709791B1Mar 23, 2004
Halftone phase shift photomask and blanks for halftone phase shift photomask for it and pattern forming method using this
DAINIPPON PRINTING CO LTD14 citations83
US6780547B2Aug 24, 2004
Halftone phase shifting photomask and blanks for halftone phase shifting photomask therefor and a method for forming pattern by using the halftone phase shifting photomask
DAINIPPON PRINTING CO LTD7 citations73
US5387485AFeb 7, 1995
Phase shift photomask
DAINIPPON PRINTING CO LTD10 citations72