Inventor
SHIN KI SOO
KR32 patents
⚠️ This page may combine multiple inventors who share the name “SHIN KI SOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HYNIX SEMICONDUCTOR INC
26 patentsUS7238653B2Jul 3, 2007
Cleaning solution for photoresist and method for forming pattern using the same
HYNIX SEMICONDUCTOR INC464 citations98
US6916594B2Jul 12, 2005
Overcoating composition for photoresist and method for forming photoresist pattern using the same
HYNIX SEMICONDUCTOR INC128 citations98
US6653047B2Nov 25, 2003
Photoresist monomers containing fluorine-substituted benzylcarboxylate and photoresist polymers comprising the same
HYNIX SEMICONDUCTOR INC10 citations74
US6875956B2Apr 5, 2005
Method of forming photoresist pattern using hot plate oven
HYNIX SEMICONDUCTOR INC3 citations63
US6858371B2Feb 22, 2005
Maleimide-photoresist monomers containing halogen, polymers thereof and photoresist compositions comprising the same
HYNIX SEMICONDUCTOR INC5 citations63
US6806025B2Oct 19, 2004
Photoresist monomers, polymers thereof and photoresist compositons containing the same
HYNIX SEMICONDUCTOR INC3 citations63
US6753128B2Jun 22, 2004
Photoresist additive for preventing acid migration and photoresist composition comprising the same
HYNIX SEMICONDUCTOR INC4 citations63
US6749990B2Jun 15, 2004
Chemical amplification photoresist monomers, polymers therefrom and photoresist compositions containing the same
HYNIX SEMICONDUCTOR INC2 citations63
US6720129B2Apr 13, 2004
Maleimide-photoresist polymers containing fluorine and photoresist compositions comprising the same
HYNIX SEMICONDUCTOR INC3 citations63
US6613493B2Sep 2, 2003
Photoresist polymer and composition having nitro groups
HYNIX SEMICONDUCTOR INC4 citations63
US7563753B2Jul 21, 2009
Cleaning solution for removing photoresist
HYNIX SEMICONDUCTOR INC2 citations62
US6787285B2Sep 7, 2004
Pattern width slimming-inhibiting method of photoresist pattern using photoresist composition containing thermal acid generator
HYNIX SEMICONDUCTOR INC4 citations59
US7056872B2Jun 6, 2006
Solution composition for removing a remaining photoresist resin
HYNIX SEMICONDUCTOR INC2 citations57
US7235349B2Jun 26, 2007
Process for forming an ultra fine pattern using a bottom anti-reflective coating film containing an acid generator
HYNIX SEMICONDUCTOR INC0 citations52
US7205089B2Apr 17, 2007
Cross-linking polymer for organic anti-reflective coating, organic anti-reflective coating composition comprising the same and method for forming photoresist pattern using the same
HYNIX SEMICONDUCTOR INC1 citations52
US7175974B2Feb 13, 2007
Organic anti-reflective coating composition and method for forming photoresist patterns using the same
HYNIX SEMICONDUCTOR INC1 citations52
US7138218B2Nov 21, 2006
Process for forming an ultra fine pattern using a bottom anti-reflective coating film containing an acid generator
HYNIX SEMICONDUCTOR INC0 citations52
US7108957B2Sep 19, 2006
Organic anti-reflective coating composition and method for forming photoresist patterns using the same
HYNIX SEMICONDUCTOR INC1 citations52
US6998442B2Feb 14, 2006
Organic anti-reflective coating polymers, anti-reflective coating composition comprising the same and preparation methods thereof
HYNIX SEMICONDUCTOR INC0 citations52
US6921622B2Jul 26, 2005
Photoresist monomers, polymers thereof and photoresist compositions containing the same
HYNIX SEMICONDUCTOR INC1 citations52
US6849375B2Feb 1, 2005
Photoresist monomers, polymers thereof and photoresist compositions containing the same
HYNIX SEMICONDUCTOR INC1 citations52
US6841526B2Jan 11, 2005
Cleaning solution for removing photoresist
HYNIX SEMICONDUCTOR INC1 citations52
US6737217B2May 18, 2004
Photoresist monomers containing fluorine-substituted benzylcarboxylate and photoresist polymers comprising the same
HYNIX SEMICONDUCTOR INC1 citations52
US7220679B2May 22, 2007
Method for forming patterns in a semiconductor device
HYNIX SEMICONDUCTOR INC0 citations51
US6764964B2Jul 20, 2004
Method for forming patterns of a semiconductor device
HYNIX SEMICONDUCTOR INC0 citations51
US7198887B2Apr 3, 2007
Organic anti-reflective coating polymer, its preparation method and organic anti-reflective coating composition comprising the same
HYNIX SEMICONDUCTOR INC0 citations49