Inventor
RUTTEN ROB JOHAN THEODOOR
NL4 patents
Patents
4 patentsUS12346032B2Jul 1, 2025
System, lithographic apparatus and method
ASML NETHERLANDS BV0 citations50
US9785060B2Oct 10, 2017
Stage system and lithographic apparatus comprising such stage system
ASML NETHERLANDS BV0 citations49
US10114298B2Oct 30, 2018
Conditioning system and lithographic apparatus comprising a conditioning system
ASML NETHERLANDS BV0 citations32
US10095130B2Oct 9, 2018
Lithographic apparatus and method in a lithographic process
ASML NETHERLANDS BV0 citations28