P

Inventor

KANAROV VIKTOR

US12 patents
⚠️ This page may combine multiple inventors who share the name “KANAROV VIKTOR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VEECO INSTR INC

9 patents
US6590324B1Jul 8, 2003

Charged particle beam extraction and formation apparatus

VEECO INSTR INC22 citations91
US7183716B2Feb 27, 2007

Charged particle source and operation thereof

VEECO INSTR INC46 citations88
US6716322B1Apr 6, 2004

Method and apparatus for controlling film profiles on topographic features

VEECO INSTR INC33 citations88
US7557362B2Jul 7, 2009

Ion sources and methods for generating an ion beam with a controllable ion current density distribution

VEECO INSTR INC12 citations83
US7879201B2Feb 1, 2011

Method and apparatus for surface processing of a substrate

VEECO INSTR INC14 citations79
US7414355B2Aug 19, 2008

Charged particle beam extraction and formation apparatus

VEECO INSTR INC5 citations72
US6774550B2Aug 10, 2004

Charged particle beam extraction and formation apparatus

VEECO INSTR INC7 citations72
US7005782B2Feb 28, 2006

Charged particle beam extraction and formation apparatus

VEECO INSTR INC3 citations61
US11466360B2Oct 11, 2022

Enhanced cathodic ARC source for ARC plasma deposition

VEECO INSTR INC0 citations43

YEVTUKHOV RUSTAM

1 patent
US8835869B2Sep 16, 2014

Ion sources and methods for generating an ion beam with controllable ion current density distribution

YEVTUKHOV RUSTAM18 citations79

HAYES ALAN V

1 patent
US8158016B2Apr 17, 2012

Methods of operating an electromagnet of an ion source

HAYES ALAN V11 citations79

DRUZ BORIS

1 patent
US9206500B2Dec 8, 2015

Method and apparatus for surface processing of a substrate using an energetic particle beam

DRUZ BORIS4 citations69